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Feedback position control system and method for an interferometer

机译:干涉仪的反馈位置控制系统和方法

摘要

A feedback position control system and method enable an optical element in a variable arm of an interferometer to be varied according to a predesignated motion profile. The system and method detect a reference optical signal that varies in intensity according to a position of the optical element in the variable arm. The system and method receive the detected reference optical signal, derive a motion profile from the detected reference optical signal and compare the derived motion profile to the predesignated motion profile to generate a control signal based on a deviation between the derived motion profile and the predesignated motion profile. The control signal is used to adjust the position of the optical element in the variable arm of the interferometer to minimize the deviation between the derived motion profile and the predesignated motion profile.
机译:反馈位置控制系统和方法使得干涉仪的可变臂中的光学元件能够根据预定的运动轮廓而变化。该系统和方法检测参考光学信号,该参考光学信号的强度根据光学元件在可变臂中的位置而变化。该系统和方法接收检测到的参考光学信号,从检测到的参考光学信号导出运动轮廓,并将导出的运动轮廓与预定运动轮廓进行比较,以基于导出运动轮廓和预定运动之间的偏差来产生控制信号。个人资料。控制信号用于调节光学元件在干涉仪的可变臂中的位置,以最小化导出的运动曲线与预定运动曲线之间的偏差。

著录项

  • 公开/公告号US2002176085A1

    专利类型

  • 公开/公告日2002-11-28

    原文格式PDF

  • 申请/专利权人 HILL GREGORY S.;

    申请/专利号US20010865317

  • 发明设计人 GREGORY S. HILL;

    申请日2001-05-25

  • 分类号G01B9/02;

  • 国家 US

  • 入库时间 2022-08-22 00:09:23

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