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Feedback position control system and method for an interferometer
Feedback position control system and method for an interferometer
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机译:干涉仪的反馈位置控制系统和方法
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摘要
A feedback position control system and method enable an optical element in a variable arm of an interferometer to be varied according to a predesignated motion profile. The system and method detect a reference optical signal that varies in intensity according to a position of the optical element in the variable arm. The system and method receive the detected reference optical signal, derive a motion profile from the detected reference optical signal and compare the derived motion profile to the predesignated motion profile to generate a control signal based on a deviation between the derived motion profile and the predesignated motion profile. The control signal is used to adjust the position of the optical element in the variable arm of the interferometer to minimize the deviation between the derived motion profile and the predesignated motion profile.
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