Nearly time-optimal feedback control of a magnetically levitated photolithography positioning system.

摘要

This paper focuses on the development of an approximate time-optimal feedback strategy for conducting rest-to-rest maneuvers of a magnetically levitated table. Classical switching curves are modified to account for the complexities of magnetic actuation as well as the coupling of the rigid body modes through the control. A smooth blend of time-optimal and proportional-derivative controls is realized near the destination point to correct for inaccuracies produced by the approximate time-optimal strategy. Detailed computer simulations of the system indicate that this hybrid control strategy provides a significant reduction in settling time as compared to proportional-derivative control alone.