首页>
外国专利>
Method to solve particle performance of FSG layer by using UFU season film for FSG process
Method to solve particle performance of FSG layer by using UFU season film for FSG process
展开▼
机译:利用UFU季节膜进行FSG工艺解决FSG层颗粒性能的方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
A method for reducing contaminants in a processing chamber 10 having chamber plasma processing region components comprising the following steps. The chamber plasma processing region components are cleaned. The chamber is then seasoned as follows. A first USG layer is formed over the chamber plasma processing region components. An FSG layer is formed over the first USG layer. A second USG layer is formed over the FSG layer. Wherein the USG, FSG, and second USG layers comprise a UFU season film. A UFU season film coating the chamber plasma processing region components of a processing chamber comprises: an inner USG layer over the chamber plasma processing region components; an FSG layer over the inner USG layer; and an outer USG layer over the FSG layer.
展开▼