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Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film
Method to solve IMD-FSG particle and increase Cp yield by using a new tougher UFUN season film
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机译:通过使用新的更坚韧的UFUN季节胶片来解决IMD-FSG颗粒并提高Cp产量的方法
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摘要
A method for reducing contaminants in a processing chamber having an inner wall by seasoning the walls. The method comprising the following steps. A first USG film is formed over the processing chamber inner wall. An FSG film is formed over the first USG film. A second USG film is formed over the FSG film. A nitrogen-containing film is formed over the second USG film wherein the first USG film, the FSG film, the second USG film and the nitrogen-containing film comprise a UFUN season film.
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