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In-situ use of dichloroethene and NH3 in an H2O steam based oxidation system to provide a source of chlorine
In-situ use of dichloroethene and NH3 in an H2O steam based oxidation system to provide a source of chlorine
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机译:在基于H2O蒸汽的氧化系统中原位使用二氯乙烯和NH3提供氯源
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摘要
A method of using dichloroethene and ammonia to provide chlorine and nitrogen during the growth of an in-situ hardened gate dielectric. The method provides a gaseous source of gettering agent and a gaseous source of dielectric strengthening agent that are compatible with each other and can be used during the formation of in-situ hardened dielectric or the strengthening of an already formed dielectric.
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