首页>
外国专利>
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp
展开▼
机译:使用多元素或串联透视的空心阴极灯对光刻激光进行绝对波长校准
展开▼
页面导航
摘要
著录项
相似文献
摘要
A tunable laser system includes a gain medium and an optical resonator for generating a laser beam, and a spectral narrowing and tuning unit within the resonator. A detection and control unit controls a relative wavelength of the laser system. A wavelength calibration module calibrates the detection and control unit. The module contains more than one species each having an optical transition line within the tuning spectrum of the laser. A beam portion of the narrowed emission from the laser is directed through the wavelength calibration module and a beam portion is directed through the detection and control unit when the laser beam is scanned through the optical transition line of each of the species within the module. The detection and control unit is monitored and calibrated during the scanning.
展开▼