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Microelectronic fabrication having microelectronic capacitor structure fabricated therein
Microelectronic fabrication having microelectronic capacitor structure fabricated therein
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机译:具有在其中制造的微电子电容器结构的微电子制造
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摘要
Within a method for fabricating a microelectronic fabrication, and the microelectronic fabrication fabricated employing the method, there is formed within the microelectronic fabrication a capacitor structure upon a conductor stud layer formed into a first via defined by a patterned dielectric layer to reach a one of a pair of patterned conductor layers within the microelectronic fabrication prior to forming through the patterned dielectric layer a second via to reach the other of the pair of patterned conductor layers within the microelectronic fabrication. The method provides the resulting microelectronic fabrication with enhanced reliability and performance.
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