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Production of ternary shape-memory alloy films by sputtering using a hot pressed target
Production of ternary shape-memory alloy films by sputtering using a hot pressed target
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机译:使用热压靶通过溅射生产三元形状记忆合金膜
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摘要
A method for producing thin film deposits of ternary shape-memory alloys using an ion sputtering deposition process comprising using a hot pressed metal powder composition target.
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