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Method and apparatus for the deposition of metal nanoclusters and films on a substrate
Method and apparatus for the deposition of metal nanoclusters and films on a substrate
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机译:在基底上沉积金属纳米团簇和薄膜的方法和设备
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摘要
A method for forming metallic nanoclusters upon a substrate includes moving the substrate through a deposition chamber at a predetermined uniform velocity and depositing metallic precursor compounds onto the substrate. The metallic precursor compounds are subsequently bombarded with an ultrasonic jet of atomic hydrogen to form the metallic nanoclusters.
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