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Silicon bulk-micromachined electromagnetic fiber-optics bypass microswitch

机译:硅体微加工电磁光纤旁路微动开关

摘要

A fiber-optic microswitch is disclosed that includes a flexible mirror positioning structure including an outer fixed frame, a movable platform upon which a mirror is formed, and two or more resilient support members (e.g., monocrystalline silicon springs or torsion beams) connecting the movable platform to the fixed frame. Stationary fibers are mounted over the mirror. An electromagnetic drive mechanism is provided for positioning the movable platform relative to the fixed frame. The electromagnetic drive mechanism includes one or more coils formed on a drive substrate mounted under the monocrystalline structure, and one or more pole pieces that are mounted on the movable platform. Currents are selectively applied to the coils to generate attractive electromagnetic forces that pull the pole pieces, thereby causing the movable platform to move (e.g., tilt) relative to the fixed frame, thereby selectively directing light from one fiber to another. Various monocrystalline structures are disclosed.
机译:公开了一种光纤微动开关,其包括柔性镜定位结构,该柔性镜定位结构包括外部固定框架,在其上形成镜的可移动平台以及连接该可移动镜的两个或更多个弹性支撑构件(例如,单晶硅弹簧或扭力梁)。平台固定框架。固定光纤安装在镜子上。提供了一种电磁驱动机构,用于将可移动平台相对于固定框架定位。电磁驱动机构包括形成在安装在单晶结构下方的驱动基板上的一个或多个线圈,以及安装在可移动平台上的一个或多个极靴。将电流选择性地施加到线圈以产生吸引电磁力,该电磁力拉动极靴,从而使可移动平台相对于固定框架移动(例如,倾斜),从而选择性地将光从一根光纤引导到另一根光纤。公开了各种单晶结构。

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