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Variable threshold voltage double gated transistors and method of fabrication

机译:可变阈值电压双栅晶体管及其制造方法

摘要

The present invention provides a double gate transistor and a method for forming the same that facilitates the formation of different transistors having different threshold voltages. The embodiments of the present invention form transistors having different body widths. By forming double gate transistors with different body widths, the preferred embodiment forms double gate transistors that have different threshold voltages, without adding excessive process complexity. The preferred embodiment of the present invention is implemented using a fin type double gated structure. In a fin type structure, the double gates are formed on each side of the body, with the body being disposed horizontally between the gates.
机译:本发明提供了一种双栅极晶体管及其形成方法,其有助于形成具有不同阈值电压的不同晶体管。本发明的实施例形成具有不同体宽的晶体管。通过形成具有不同主体宽度的双栅晶体管,优选实施例形成具有不同阈值电压的双栅晶体管,而不会增加过多的工艺复杂性。本发明的优选实施例使用鳍型双栅结构来实现。在鳍型结构中,双闸门形成在主体的每一侧上,主体水平地设置在闸门之间。

著录项

  • 公开/公告号US6492212B1

    专利类型

  • 公开/公告日2002-12-10

    原文格式PDF

  • 申请/专利权人 INTERNATIONAL BUSINESS MACHINES CORPORATION;

    申请/专利号US20010972172

  • 发明设计人 MEIKEI IEONG;EDWARD J. NOWAK;

    申请日2001-10-05

  • 分类号H01L210/084;H01L213/36;H01L213/205;H01L214/763;

  • 国家 US

  • 入库时间 2022-08-22 00:04:29

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