A cellular automata neural network method for process modeling of film-substrate interactions utilizes a cellular automaton system having variable rules for each cell. The variable rules describe a state change algorithm for atoms or other objects near a substrate. The state change algorithm is used to create a training set of solutions for training a neural network. The cellular automaton system is run to model the film-substrate interactions with the neural network providing the state change solutions in place of the more computationally complex state change algorithm to achieve real-time or near real-time simulations.
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