Smart load port with integrated carrier monitoring and fab-wide carrier management system

摘要

A load port assembly capable of monitoring a plurality of performance characteristics of wafer carriers. The load port assembly may include one or more of the following monitoring systems: a torque measurement system, a wafer height measurement system, a carrier identification reader, an information pad, a resistivity measurement system, a cleanliness measurement system, a seal performance detector, and a relative humidity detector. In a preferred embodiment of the present invention, each of the monitoring systems are integrated into either a carrier advance plate or a port door of the load port assembly.