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SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM
SMART LOAD PORT WITH INTEGRATED CARRIER MONITORING AND FAB-WIDE CARRIER MANAGEMENT SYSTEM
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机译:带有集成运营商监控和FAB全方位运营商管理系统的智能装载端口
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摘要
A kind of system is disclosed, the chip carrier load port (28) and a kind of system that can monitor multiple features are used to manage the basis of carry operation manufacturing device width.
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