METHOD FOR PRODUCING ASPHERICAL STRUCTURE, AND ASPHERICAL LENS ARRAY MOLDING TOOL AND ASPHERICAL LENS ARRAY PRODUCED BY THE SAME METHOD

摘要

A method for producing an aspherical structure according to theinvention includes the steps of: forming a layer on a surfaceof a substrate so that the layer exhibits an etching ratedistribution in a direction perpendicular to the surface of thesubstrate; forming a mask having a predetermined opening shapeon the surface of the layer; and etching the layer to therebyform at least one aspherical concave portion. When each concaveportion is used as a molding tool so that a resin with whichthe concave portion is filled is solidified and removed fromthe concave portion, an aspherical lens array can be formedaccurately.