Method for fabricating tiny field emitter tips

摘要

A method for fabricating tiny field emitter tips (513-516) across the surface of a substrate (502). A substrate (502) is first exposed (504) to reactive molecular, ionic, or free radical species to produce nanoclusters (508) within a thin surface layer (506) of the substrate. The substrate may then be thermally annealed to produce regularly sized and interspaced nanoclusters. Finally, the substrate is etched to produce the field emitter tips (513-516).