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Triode-type field emission device having field emitter composed of emitter tips with diameter of nanometers and method for fabricating the same

机译:具有由具有纳米直径的发射器尖端组成的场发射器的三极型场发射装置及其制造方法

摘要

A triode-type field emission device includes an insulating substrate; a cathode formed on the insulating substrate; a field emitter aligned on the cathode, wherein the field emitter includes a plurality of emitter tips and each emitter tip has the diameter of nanometers; an insulating layer positioned around the field emitter for electrically isolating the field emitter; and a gate electrode formed on the insulating layer, wherein the gate electrode is closed to an upper portion of the field emitter. Therefore, the triode-type field emission device may be operable in a low voltage.
机译:三极管型场致发射器件包括绝缘基板;以及绝缘层。在绝缘基板上形成的阴极;在阴极上对准的场发射器,其中场发射器包括多个发射器尖端,并且每个发射器尖端具有纳米的直径;绝缘层位于场发射器周围,用于将场发射器电隔离。栅电极形成在绝缘层上,其中栅电极封闭到场发射器的上部。因此,三极管型场发射器件可以在低电压下操作。

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