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Method for making glass by plasma deposition using silica powder, silica powder and photomask obtained by the method
Method for making glass by plasma deposition using silica powder, silica powder and photomask obtained by the method
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机译：使用二氧化硅粉末，二氧化硅粉末和通过该方法获得的光掩模通过等离子体沉积制造玻璃的方法
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摘要
A method for manufacturing a photomask material includes delivering a powder containing silicon dioxide into a plasma to produce silica particles and depositing the silica particles on a deposition surface to form glass.
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