PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL, AND METHOD TO USE THE SAME

摘要

The device and method of planarized substrate are provided. Equipment (101) includes that bracket (202) includes plate (212) in substrate (230); First chamber (238), for forcing plate in predetermined direction; Spacer (260) is coupled to external plates (212); Film (250) is coupled to the plate and passes through gasket (260) and plate by the spacer of thickness; The film and plate for forcing film limited between second chamber (251) is in the other directions. The peripheral edge that this method is related to pressing substrate (244) againsts polishing pad (226) and first pressure, and presses the inside (244) of substrate and pad (226) and second pressure.