PNEUMATIC DIAPHRAGM HEAD HAVING AN INDEPENDENT RETAINING RING AND MULTI-REGION PRESSURE CONTROL AND METHOD TO USE THE SAME

摘要

An apparatus and method for planarizing a substrate. Plate 212 for receiving the substrate 230, the device 101 thereon; The first chamber (238) exerts a force on the plate in a predetermined direction; The spacer 260 is bonded to the outer edge of the plate; The membrane 250 is separated from the coupling to the plate through the spacer 260 and the plate as the spacer thickness; And a carrier (202) having a second chamber 251 formed in this judges for applying the force to the other predetermined direction on the membrane and the membrane. The method includes pressurizing the interior of the substrate 244 with respect to the step of pressing if the ambient, and the second pressure to the pads 226 of the substrate 244 against the polishing pad 226 to a first pressure do.