Integration device for a vacuum pumping system in a clean room false floor of a semiconductor components factory

摘要

The device has platform (1) having size greater than the floor space requirement of the vacuum pumping systems (15,16), and equal to that of false floor tile. Four support blocks hold the platform away from supporting slab, and below false floor at a depth which is greater than the height of vacuum pumping system to be integrated. An Independent claim is also included for semiconductor manufacturing plant.