DEVICE FOR INTEGRATING VACUUM PUMPING SYSTEM IN CLEAN ROOM FALSE FLOOR IN SEMICONDUCTOR COMPONENT MANUFACTURING PLANT

摘要

PROBLEM TO BE SOLVED: To make a part of a space underneath a vacuum pumping system free for the free passage of cables and ducts, and to provide an intermediate supporting platform for the vacuum pumping system which mechanically isolates the vacuum pumping system with respect to the false floor.;SOLUTION: The vacuum pumping system is integrated in the intermediate space between a supporting slab 21 and a clean room false floor formed from the juxtaposition of false floor tiles 100 held by posts mounted on the supporting slab 21. A platform 1, whose size is greater than the floor space requirement of the vacuum pumping systems 15, 16, and substantially equal to that of a false floor tile 100, is held away from the supporting slab 21 by feet 17 to 20 mounted on the supporting slab 21. Thus, a part of the space underneath the vacuum pumping systems 15, 16 is free, for the free passage of cables and ducts. Simultaneously, the vacuum pumping systems 15, 16 are isolated with respect to the false floor in order to avoid the transmission of vibrations.;COPYRIGHT: (C)2004,JPO