Apparatus of vapor phase synthesis for synthesizing carbon nanotubes or carbon nanofibers and synthesizing method of using the same

摘要

Disclosed are a gas phase synthesis apparatus for synthesizing carbon nanotubes or carbon nanofibers and a synthesis method using the same. The gas phase growth value of the present invention is connected to the exhaust port of the vertical reactor and installed outside the reactor, and includes a flow controller for controlling the flow rate of the source gases and their reactants in the reactor. By using the gas phase synthesis apparatus according to the present invention, carbon nanotubes or carbon nanofibers having a diameter of several tens of nm or less can be synthesized in large quantities.