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Structure having microchannel and sensor and heater contacting with fluid in microchannel and method for manufacturing the same
Structure having microchannel and sensor and heater contacting with fluid in microchannel and method for manufacturing the same
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机译:具有微通道以及传感器和加热器与微通道中的流体接触的结构及其制造方法
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摘要
PURPOSE: A structure having a micro channel, and a sensor and heaters directly contacting with fluid inside the micro channel, and a method for manufacturing the same are provided to reliably measure physical characteristics of the fluid flowing in the micro channel in real time. CONSTITUTION: A structure having a micro channel(50) includes a semiconductor substrate(48) having a predetermined length of groove for forming a micro channel, and a glass substrate(40) of which one side is joined with the groove-formed surface of the semiconductor substrate, a sensor(44) directly measuring physical characteristics of fluid flowing in the micro channel, a plurality of local heaters(46) directly heating the fluid at a random position in the micro channel, and a main heater(42) installed at a circumference of the micro channel.
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