- A Stage Device Of X-Y Precision Drive Using VCM

摘要

PURPOSE: An X-Y drive stage apparatus using VCM is provided to control accurately positions of two axes of a sample by arranging symmetrically linear springs, center units, auxiliary units, and magnetic force generators. CONSTITUTION: An X-Y drive stage apparatus using VCM includes a Y-axis stage(20), an X-axis stage(30), a stage base, and a couple of magnetic force generators. The Y-axis stage includes the first connection unit(24), the first auxiliary unit(23), the first straight spring(21a), and the first auxiliary straight spring(23a). The first connection unit is installed at both sides of a sample transfer portion. The first auxiliary unit is installed at both sides of the first center unit(21). The first straight spring is formed between the first auxiliary units. The first auxiliary straight spring is formed at both sides of the first auxiliary unit. The X-axis stage includes the second auxiliary unit(33), the second straight spring(31a), the second auxiliary straight spring(33a), and the second connection unit(34). The second auxiliary unit is installed parallel to the second center unit(31). The second straight spring is formed between the second auxiliary units. The second auxiliary straight spring is formed at both sides of the second auxiliary unit. The second connection unit is formed at a center portion of the second auxiliary straight spring. The stage base has an open top portion. The magnetic force generators are used for performing an X-axis movement or a Y-axis movement.