A Stage Device Of X-Y Precision Drive Using VCM

摘要

An apparatus for precisely driving X-Y stages using and plate springs a VCM (Voice Coil Motor) performing biaxial movement in relation to a specimen transferring apparatus used in a microscope. The apparatus includes X and Y axis stages of the same structure, each of which has a part driving on both fixed sides and a part connected to the driving part by an elastic member and driving in the same direction as the driving part, and magnetic force generators connected to the stages respectively for providing the stages with driving force.