ABERRATION ESTIMATING METHOD OF IMAGE FORMATION OPTICAL SYSTEM, HANDLING METHOD OF IMAGE FORMATION OPTICAL SYSTEM, PROJECTING EXPOSURE APPARATUS AND METHOD THEREFOR, RECORDING MEDIUM, AND CARRIER WAVE CAPABLE OF RECEIVING TO COMPUTER

摘要

The evaluation method comprises a step (S11) of setting an aberration polynomial that generally expresses the aberration of the imaging optical system as a function of the image plane coordinates and pupil coordinates, a measurement step (S12) of measuring the wavefront aberration of the imaging optical system for a plurality of points in the image plane of the imaging optical system, an approximation step (S13) of approximating a specified polynomial as a function of the pupil coordinates to the wavefront aberration obtained in the measurement step, and a step (S14) of determining the coefficients of the respective terms of the aberration polynomial on the basis of the coefficients of the respective terms in the specified polynomial obtained in the approximation step. IMAGE