首页> 外国专利> OPTICAL UNIT, IMAGE-FORMING OPTICAL SYSTEM, METHOD FOR ADJUSTING ABERRATION OF IMAGE-FORMING OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, METHOD FOR PRODUCING PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

OPTICAL UNIT, IMAGE-FORMING OPTICAL SYSTEM, METHOD FOR ADJUSTING ABERRATION OF IMAGE-FORMING OPTICAL SYSTEM, PROJECTION OPTICAL SYSTEM, METHOD FOR PRODUCING PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND EXPOSURE METHOD

机译:光学单元,图像形成光学系统,调整图像形成光学系统的像差的方法,投影光学系统,制造投影光学系统的方法,曝光设备和曝光方法

摘要

An optical unit for liquid immersion change attachable to a dry-type image-forming optical system for forming the image of an object through a gas and used for changing the dry-type image forming optical system to a liquid-immersed-type image-forming optical system for forming the image of the object through a liquid. This optical unit comprises at lease one optical member interchangeable with an optical member disposed on the image side of the optical surface that has a predetermined refractive power and is disposed closest to the image side, among the optical surfaces having a refractive power and arranged in the dry-type image-forming optical system. By interchanging the optical member of the dry-type image-forming optical system with the at lease one optical member, the degradation of the image-forming characteristic of the image forming optical system caused by the change of the medium kind on the image side of the image-forming optical system from a gas to a liquid is reduced.
机译:用于液体浸没变化的光学单元可安装到用于通过气体形成物体的图像的干式图像形成光学系统,并且用于将干式图像形成光学系统改变为液浸式图像形成。用于通过液体形成物体图像的光学系统。该光学单元至少包括一个光学部件,该光学部件与具有屈光力并布置在光学系统中的具有屈光力的光学表面中的光学部件可互换,该光学部件设置在具有预定屈光力的光学表面的像侧,并且最靠近像侧。干式成像光学系统。通过将干式图像形成光学系统的光学部件与至少一个光学部件互换,由介质种类的变化引起的图像形成光学系统的图像形成特性的劣化。减少了从气体到液体的成像光学系统。

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