Massive synthesis method of purified carbon nanotubes vertically aligned on large-area substrate using the thermal chemical vapor deposition

摘要

PURPOSE: A method for synthesizing a carbon nanotube by using a thermochemical vapor deposition method is provided which mass-synthesizes the carbon nanotubes vertically aligned on a large area base plate with high purity. CONSTITUTION: The method comprises steps of: (i) forming a catalytic metal film on a base plate; (ii) etching the catalytic metal film to independently isolate nano-sized catalytic metal particles; and (iii) growing carbon nanotube per isolated nano-sized catalytic metal particle by a thermochemical vapor deposition method using carbon source gas to form plural carbon nanotubes vertically aligned on the base plate.