A Replacement sensing device of inertial measurement sensor using levitation system

摘要

PURPOSE: A displacement sensing apparatus is provided to sense the rotating angle and displacement of inertia sensor in an accurate manner by using a simple device. CONSTITUTION: A central magnetic member(40) of an inertia sensor utilizing magnetic levitation system, has a rotating angle sensing reflector plate(20) and a displacement sensing reflector plate(30) which are attached to the central magnetic member. The inertia sensor has an external optical device for radiating light to the central magnetic member and sensing the light reflected from the rotating angle sensing reflector plate and the displacement sensing reflector plate. The reflector plates have surfaces which reflect light and other portions which do not reflect light. The surfaces reflecting light are formed into multiple columns, and have different widths in each column. The reflector plates have boundary reflecting surfaces formed at the outermost parts of the reflector plates, respectively.