REGENERATING PROCESS AND REGENERATING SYSTEM TO REGENERATE WASTE SLURRY FROM SEMICONDUCTOR WAFER MANUFACTURING PROCESS

摘要

PURPOSE: A regenerating process and a regenerating system to regenerate waste slurry from semiconductor wafer manufacturing process are provided to remarkably decrease the quantity of slurry consumed in the semiconductor fabricating process by recycling more 90 percent of used slurry periodically generated in the semiconductor wafer fabricating process. CONSTITUTION: Waste slurry is agitated to spread out a deposit composed of a polishing agent and a cutting material. The agitated slurry is mixed with recycled oil to dilute the agitated slurry. The waste slurry is firstly centrifuged to extract the polishing agent. The first oil centrifuged in the first centrifugal process is secondly centrifuged to generate the second oil and a cutting material. The second oil is filtered by using a filter(60) and is refined and reduced to recycled oil.