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BOARD FOR CHECKING CONNECTION OF WAFER BURN-IN SYSTEM AND CONNECTION CHECKING METHOD USING THE SAME

机译:晶圆内置系统连接检查板及使用该连接板的连接检查方法

摘要

PURPOSE: A board for checking the connection of a wafer burn-in system and a connection checking method using the same are provided to be capable of using a variety of load conditions. CONSTITUTION: A board(500) for checking the connection state of a wafer burn-in system is provided with an input connection part connected with each connection pin of a performance measuring board(250), and an input switching part connected with all the connection line of the input connection part for transmitting the current/voltage signal supplied from the performance measuring board by carrying out a switching process. The board further includes a plurality of resistors connected to the input switching part and a plurality of switching parts one-to-one connected with the resistors for switching the flow of the current/voltage signal by using the control signal supplied from a main test apparatus. At this time, the resistors have different resistances, respectively.
机译:目的:提供用于检查晶片老化系统的连接的板和使用该板的系统的连接检查方法,以能够使用各种负载条件。构成:用于检查晶片老化系统连接状态的板(500),其输入连接部分与性能测量板(250)的每个连接引脚连接,输入切换部分与所有连接连接输入连接部分的电源线,用于通过执行开关过程传输从性能测量板提供的电流/电压信号。该板还包括连接到输入开关部分的多个电阻器和与电阻器一对一连接的多个开关部分,用于通过使用从主测试装置提供的控制信号来切换电流/电压信号的流动。 。此时,电阻器分别具有不同的电阻。

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