首页>
外国专利>
BOARD FOR CHECKING CONNECTION OF WAFER BURN-IN SYSTEM AND CONNECTION CHECKING METHOD USING THE SAME
BOARD FOR CHECKING CONNECTION OF WAFER BURN-IN SYSTEM AND CONNECTION CHECKING METHOD USING THE SAME
展开▼
机译:晶圆内置系统连接检查板及使用该连接板的连接检查方法
展开▼
页面导航
摘要
著录项
相似文献
摘要
PURPOSE: A board for checking the connection of a wafer burn-in system and a connection checking method using the same are provided to be capable of using a variety of load conditions. CONSTITUTION: A board(500) for checking the connection state of a wafer burn-in system is provided with an input connection part connected with each connection pin of a performance measuring board(250), and an input switching part connected with all the connection line of the input connection part for transmitting the current/voltage signal supplied from the performance measuring board by carrying out a switching process. The board further includes a plurality of resistors connected to the input switching part and a plurality of switching parts one-to-one connected with the resistors for switching the flow of the current/voltage signal by using the control signal supplied from a main test apparatus. At this time, the resistors have different resistances, respectively.
展开▼