Determining image distortions of optical illuminated devices comprises applying photo-active layer on substrate, and forming latent image in photo-active layer

摘要

Determining image distortions of optical illuminated devices comprises applying a photo-active layer on a substrate; forming a latent image of the mask in the photo-active layer by irradiating; treating with amplifying agent which reacts with components of the material of the photo-active layer to form a chemical bond; and determining the growth of the photo-active layer outside and/or inside the image of the mask Independent claims are also included for the following: (i) a process for optimizing optical illuminated devices; and (ii) a process for determining the local radiation dose. Preferred Features: After producing the latent image, a contrasting step is carried out, preferably by heat treating. An anti-reflection layer is formed on the substrate below the photo-active layer.