Semiconductor device with reference markings for determining positional accuracy of overlaid layers has reference markings allocated to respective different planes

摘要

The position of a first reference marking (T1) is used to determining the accuracy of the overlay of one plane (L1) by at least two different planes (L2,L3). Further reference markings (T2,T3) are allocated to respective different planes (L2,L3). The reference markings may be interleaved within each other, and/or arranged point symmetrically. Independent claims are also included for a method of manufacturing a semiconductor device; and for the use of reference markings to determine accuracy of overlay.