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Mechanically and thermodynamically stable amorphous carbon coatings for temperature-sensitive surfaces
Mechanically and thermodynamically stable amorphous carbon coatings for temperature-sensitive surfaces
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机译:机械和热力学稳定的无定形碳涂层,用于温度敏感的表面
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摘要
The invention relates to a method for depositing mechanically and thermodynamically stable amorphous carbon layers using a low-pressure plasma deposition method, especially a PE-CVD or combined PVD-/PE-CVD method. According to the invention, the average kinetic energy per deposited carbon atom is lower than 20 eV, preferably lower than 10 eV and the ionic current density j is smaller than 0.2 mA/cm2, preferably smaller than 0.1 mA/cm2.
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机译:本发明涉及一种使用低压等离子体沉积方法,特别是PE-CVD或PVD- / PE-CVD组合方法沉积机械和热力学稳定的非晶碳层的方法。根据本发明,每个沉积的碳原子的平均动能小于20eV,优选小于10eV,并且离子电流密度j小于0.2mA / cm 2,优选小于0.1mA / cm 2。 >。
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