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Diode with a short recovery time, and production method thereof
Diode with a short recovery time, and production method thereof
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机译:恢复时间短的二极管及其制造方法
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摘要
A soft recovery diode is made by first implanting helium into the die to a location below the P/N junction and the implant annealed. An E-beam radiation process then is applied to the entire wafer and is also annealed. The diode then has very soft recovery characteristics without requiring heavy metal doping.
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