Method for controlling rotation of a semiconductor disk during high temperature treatment measures the temperature of the disk with a pyrometer as a function of time

摘要

A gas tight sealed quartz chamber (1) with a graphite support/susceptor (2) coated with silicon carbide holds a semiconductor disk (3). Halogen lamps (4) with infrared beams heat up the semiconductor disk to the right temperature. A temperature sensor (5) and a pyrometer (7) measure the disk's temperature to be compared by a master computer (6) with a stored target temperature.