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MOLYBDENUM TUNGSTEN MATERIAL FOR WIRING, MOLYBDENUM TUNGSTEN TARGET FOR WIRING, METHOD FOR THEIR PRODUCTION AND THIN MOLYBDENUM TUNGSTEN WIRING
MOLYBDENUM TUNGSTEN MATERIAL FOR WIRING, MOLYBDENUM TUNGSTEN TARGET FOR WIRING, METHOD FOR THEIR PRODUCTION AND THIN MOLYBDENUM TUNGSTEN WIRING
A molybdenum-tungsten material for wiring comprising 20-95 atm % of tungsten and 80-5 atm % of molybdenum and inevitable impurities as a whole. It is prepared by integrally compositing molybdenum and tungsten by. e.g., powder metallurgy or dissolution techniques, or by arranging both metals so as to have the above-specified compositional ratio. This material has a low resistivity and excellent workability and etchant resistance, and provides a wiring thin film usable as, e.g., an address wiring of a liquid crystal display. The molydbenum-tungsten target for wiring comprises 20-95 atm % of tungsten and 80-5 atm % of molybdenum and inevitable impurities, and enables the wiring thin film to be formed at a good reproducibility. IMAGE
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