Equipment supplying two or more gases from five sources to trace impurity analyzers, includes appropriate pipework and valves for connection with purge system

摘要

A supply line (LF) takes gas to and is connected to the analyzer (AP). The other end is connected to a purge line (LpLF) for it (LP). Sampling lines are connected to the sources (A, B, C, D, E) or to a purge line using appropriate valves (vA-vE). Further interconnection valves (VA-VE) complete the circuit and are provided with change-over actuators. A source of inert gas (SG) is provided. Each purge line downstream of the sampling lines is connected to the source of inert gas and comprises an offtake for general purging, controlled by a take-off valve (Vd). Vent valves are provided on the purge line for the supply line and the purge lines upstream of the sampling lines. Purge offtakes are located downstream of the sampling lines placed between the source of inert gas and the offtake valve. The circuitry is further detailed in accordance with the foregoing principles. Connection is made to analyzers having differing sensitivities.