METHOD AND APPARATUS FOR FORMING PZT CRYSTAL FILM BY HYDROTHERMAL SYNTHETIC METHOD

摘要

PROBLEM TO BE SOLVED: To provide a new method and an apparatus for forming a PZT crystal film in a chemically stable and easily handleable state by a hydrothermal synthetic method.;SOLUTION: The method for forming the PZT crystal film by the hydrothermal synthetic method comprises attaching a substrate for forming a piezoelectric crystal to an agitation blade provided in an autoclave and rotating the agitation blade. Thereby, the film can be formed in a state that the contact pressure of a solution for forming the crystal in the autoclave to the surface of the substrate is increased.;COPYRIGHT: (C)2005,JPO&NCIPI