METHOD OF MANUFACTURING CARBON NANOTUBE, CARBON NANOTUBE DEVICE AND ELECTRICAL DOUBLE LAYER CAPACITOR

摘要

PPROBLEM TO BE SOLVED: To provide a method of manufacturing carbon nanotube capable of forming a carbon nanotube by a simple process and of accomplishing mass-production and area-enlargement of the carbon nanotube, and to provide a carbon nanotube device and an electrical double layer capacitor using the same. PSOLUTION: A non-catalyst metallic layer 2 which comprises Ti as a main component is formed on a catalyst metal substrate 1 comprising a catalyst metal such as Ni, Co, Fe or the like by a film forming method such as an electron beam vapor deposition method and a sputtering method. Thus, the substrate 100 comprised of a laminate structure of the catalyst metal substrate 1 and the non-catalyst metallic layer 2 is formed. It is preferable that the film thickness of the non-catalyst metallic layer 2 is from 50 Å or more to 400 Å or less. The substrate 100 is set in a vessel of a heat CVD (chemical vapor deposition) apparatus and is heated in an atmosphere including a hydrocarbon gas as a raw material gas to grow the carbon nanotube on the non-catalyst metallic layer 2. PCOPYRIGHT: (C)2005,JPO&NCIPI