CARBON NANOTUBE, ITS MANUFACTURING METHOD, CARBON NANOTUBE DEVICE AND ELECTRICAL DOUBLE LAYER CAPACITOR

摘要

PROBLEM TO BE SOLVED: To provide a uniform, high-density, large-area carbon nanotube which can be formed through an easy process and enables mass production, its manufacturing method and a carbon nanotube device and an electrical double layer capacitor using the same.;SOLUTION: An Al layer 2 essentially comprising Al and a catalyst metal layer 3 made of a catalyst metal are formed on a conductive substrate 1 made of a high-melting conductive material. As the conductive material, a high-melting metal having a melting point of ≥1,660°C or carbon can be used. A substrate 100 is set inside a vessel of a thermal CVD system, heated in vacuo by a heater and retained for a prescribed period of time so that catalyst particulates 5 are evenly dispersed on the conductive substrate 1 at a high density. Then, while the temperature of the substrate 100 is being retained, a carbon-containing gas is introduced into the vessel and retained for a prescribed period of time to perform thermal decomposition of the carbon-containing gas and form the carbon nanotube 6 on the catalyst particulates 5.;COPYRIGHT: (C)2005,JPO&NCIPI