TITANIA NANO FINE CRYSTAL DISPERSED THIN FILM PATTERN AND PRODUCTION METHOD FOR THE SAME AND ARTICLE WITH THE THIN FILM PATTERN

摘要

PROBLEM TO BE SOLVED: To provide a titania nano fine crystal dispersed thin film with titania nano fine crystal thin films dispersed at optional parts of a substrate as an optional pattern of submicron order, and also provide a production method used for the same, and an article with the thin film pattern.;SOLUTION: A film containing a compound metal oxide or hydroxide of a titanium compound and a silicon alkoxide modified with β-diketone is formed from a solution containing the silicon alkoxide, a hydrolyzable titanium compound and β-diketone. This film is masked with a predetermined pattern and irradiated with UV rays. After the parts irradiated with the UV rays are cured, nonirradiated parts are etched, and then the irradiated parts are contacted with water or hot water to deposit titania fine crystals on the surface thereof, and thus the titania nano fine crystal dispersed thin pattern is produced.;COPYRIGHT: (C)2004,JPO