METHOD AND DEVICE FOR MEASURING INDENTATION DEPTH OF SPHERICAL INDENTER

摘要

PROBLEM TO BE SOLVED: To provide a method of measuring the indentation depth of a spherical indenter, and a device therefor.;SOLUTION: The method of measuring the indentation depth of the spherical indenter into the surface of a sample, is characterised in that one transparent sphere is used as the spherical indenter and a laser coupling lens to be arranged on the optical axis of both of a laser light source and a light detecting sensor, a test sample, a laser beam radiation surface and a laser beam detecting surface are fixed and the transparent sphere is displaced in order to press the transparent sphere into the surface of a sample and light power measured by the light detecting sensor is inereased and decreased by causing axial shift in the laser coupling axis of a spherical lens with a laser beam, and a region set to the linear relation in the relation between the moving quantity of the spherical lens and the light power is utilized to measure the displacement quantity of the spherical indenter on the basis of displacement quantity converted from the light power. The device for measuring the indentation depth of the spherical indenter is also disclosed.;COPYRIGHT: (C)2004,JPO&NCIPI