PROCESS FOR SYNTHESIZING DIAMOND-LIKE CARBON FILM

摘要

PROBLEM TO BE SOLVED: To provide a process for synthesizing a diamond-like carbon film which can be synthesized at a low cost and can be applied, in a uniform thickness, onto a member having a surface of a given shape, and a process for synthesizing the diamond-like carbon film having a p- or n-type conductivity.;SOLUTION: The member 3 is placed on a member holder 5 of a synthesizer, an organic liquid 10 is filled, an N₂ gas is fed through a valve 8 to replace air remaining inside the synthesizer by the N₂ gas, and the member 3 is heated by applying electric current via an electrode 4. Bubbles comprising a gas of the organic liquid 10 are generated from and cover the surface of the member 3. The organic liquid 10 is cooled and maintained at a temperature equal to or lower than its boiling point using a water-cooling means 2, and the organic liquid 10 in a vapor phase is returned to a liquid tank 1 using a condensation means 7. By maintaining the synthesizer in such state for a fixed time determined according to the desired thickness of the diamond-like carbon film, the diamond-like carbon film is synthesized on the member 3.;COPYRIGHT: (C)2004,JPO