MAGNETOOPTIC WAVEGUIDE WITH SILICON WAVEGUIDE LAYER AND OPTICAL NONRECIPROCAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a magnetooptic waveguide which has a high magnetooptic effect and which is easily integrated with other semiconductor optical elements, an optical nonreciprocal element using it, and an optical integrated circuit obtained by integrating them with the other semiconductor optical elements.;SOLUTION: The magnetooptic waveguide is constructed so as to obtain a magnetic garnet/silicon/silicon dioxide structure by bonding together an SOI substrate, consisting of a core layer composed of a silicon crystal, a first cladding layer composed of a dielectric silicon dioxide and a holding member to hold them in the form of three layered lamination of which the intermediate layer is the first cladding layer composed of the dielectric silicon dioxide, and a second cladding layer composed of the magnetic garnet with an wafer bonding on the core layer surface.;COPYRIGHT: (C)2004,JPO&NCIPI