METHOD FOR MANUFACTURING GAS-SENSITIVE FILM FOR GAS SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a gas-sensitive film for gas sensors with a superior response property.;SOLUTION: The manufacturing method includes an ink manufacturing process for manufacturing an ink 10, where viscosity is adjusted to 1-20 mPas, by dispersing a particle 11 in nano meter order covered with a dispersant 13 into a solvent 12; a pattern forming process for forming a desired ink pattern 5a on a substrate 2 by discharging the ink 10 onto the silicon substrate 2 by an ink jet apparatus 20; and a heating process for sintering an ink pattern 5a by heating and forming the gas-sensitive film 5. The gas-sensitive film 5 after sintering is formed thinly, thus forming the gas-sensitive film 5 for gas sensors having a superior response property.;COPYRIGHT: (C)2004,JPO&NCIPI