SQUEEGEE POLISHING DEVICE AND SQUEEGEE POLISHING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a squeegee polishing device capable of performing prescribed polishing with good productivity, and a squeegee polishing method.;SOLUTION: A squeegee holder 8 on which a squeegee 3 to be polished is mounted and fixed is held and fixed by holding means 9A, 9B, 10, 11. On one side of the squeegee holder 8, a polishing mechanism for rough finishing provided with a grinding wheel 1 for rough finishing, a driving motor 4 for rough finishing and a sliding part 6 for the driving motor for rough finishing are provided, and a polishing mechanism for final finishing provided with a grinding wheel 2 for final finishing, a driving motor 5 for final finishing and a sliding part 7 for the driving motor for final finishing are provided on the other side thereof. Firstly polishing for rough finishing is performed with the grinding wheel 1 for rough finishing of the polishing mechanism for rough finishing, and secondly polishing for final finishing is performed with the grinding wheel 2 for final finishing of the polishing mechanism for final finishing.;COPYRIGHT: (C)2004,JPO