THERMAL INFRARED DETECTOR HAVING SMALL THERMAL TIME CONSTANT, AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide a thermal infrared detector, capable of preventing a image flow from generating even in an action of a high frame rate, and to restraint increase in 1/f noise.;SOLUTION: The detector is made to adapt to the action of the high frame rate by making a 5th insulation protecting membrane 8d a 4th insulation protecting membrane 8c by etching, and reducing the thermal time constant by thinning the diaphragm 5, and also a thin film 7 for a bolometer is formed over the whole surface of the diaphragm 5.;COPYRIGHT: (C)2004,JPO